基于VC的自动化镀膜仪控制系统研究

文章针对双光路膜厚监控原理,设计了双锁相放大电路、复合滤波处理和数字判断等一套微弱信号优化处理方案,并在VC 6.0集成开发环境下进行自动化监控。实验结果表明:膜厚监控系统的低反射率膜的反射率显示分辨极限为0.02%,膜厚控制的标准偏差为0.55%;软件控制系统工作可靠,界面设计友好,人机互动性强,图标和状态指示器等特色界面丰富了界面功能和方便了用户。在对监控信号的高稳定和高精度检测基础上用VC实现了镀膜全部工艺过程的自动化,并且性能价格比优于同类镀膜设备系统。

Development of an auto-monitoring system of depositing thin-film based on VC

An optimization processing system of faint photoelectric signals is designed according to the thin-film thickness monitoring(TFTM) principle of dual-light beams.The system adopts the dual-lock-phase circuit and the compound filter and has the function of digital judgement.Then an automated TFTM system is developed based on VC 6.0.Experiment results show that the display resolution limit of the TFTM system on lower reflectivity is 0.02% and the standard deviation of TFTM is 0.55%.The software system can run steadily and has amicable program interfaces and high ability of man-machine interaction.The characteristic interfaces of the pattern-title and status indication enrich the interface and are convenient for users.Based on high precision of monitoring signals and high measurement stability,all auto-monitoring functions of depositing optical thin-film are achieved with VC.The performance-cost ratio of the presented TFTM system is superior to the similar coaters.