| 影响TiN掺金镀装饰膜质量的工艺因素 |
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| 引用本文： | 程树英.影响TiN掺金镀装饰膜质量的工艺因素[J].福州大学学报(自然科学版),1999,27(4):21-23. |
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| 作者姓名： | 程树英 |
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| 作者单位： | 福州大学电子科学与应用物理系,福建福州350002 |
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| 摘 要： | 分析了用多弧离子镀和磁控溅射方法镀制 Ｔｉ＋ Ｔｉ Ｎ＋ Ａｕ 装饰膜的工艺中， 影响膜层质量的主要工艺因素实践表明， 在基材经过严格的前处理后， 只要对镀膜工艺进行合理的控制， 就能制出既有 Ｔｉ Ｎ 的硬度和耐磨性、又有黄金色泽的装饰膜层
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| 关 键 词： | 装饰膜 离子镀 磁控溅射 TiN Au |
| 修稿时间： | 1999-01-05 |
Influence of Process Factors on Decorative Ti+TiN+Au Films' Quality |
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| CHENG Shu-ying.Influence of Process Factors on Decorative Ti+TiN+Au Films' Quality[J].Journal of Fuzhou University(Natural Science Edition),1999,27(4):21-23. |
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| Authors: | CHENG Shu-ying |
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| Institution: | C H E N G Shu - ying( Departmentof Electronic Science and Applied Physics, Fuzhou university , Fujian Fuzhou 350002 , China) |
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| Abstract: | Decorative Ti + Ti N+ Au films are fabricated by multiarc ion plating and magnetron sputter ing methods The process factors which influence the quality of the films have been analysed Practiceindicates that ,after the substrate preprocessed seriously ,the decorative films which have the hardnessand wearresistance of Ti Ncoating and the color of Au can be obtained by a suitable process |
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| Keywords: | TiN Au |
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