| MEMS器件及在通信的应用 |
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| 引用本文： | 屠立刚.MEMS器件及在通信的应用[J].山西科技,2007(5):47-47,50. |
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| 作者姓名： | 屠立刚 |
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| 作者单位： | 天津铁道职业技术学院 |
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| 摘 要： | 电子工业已经成为世界上规模最大的工业。电子器件是电子工业的基础,该领域的发展十分迅速,新器件、新效应、新技术日新月异。半导体器件的特征尺寸已进入微米量级。近年来MEMS（微电子机械系统）器件的出现和发展引起各工业大国的关注。文章介绍了MEMS的主要特点及其在通信领域的应用。
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| 关 键 词： | 谐振器 Q值 集成电路 静电力 微执行器 微传感器 |
| 文章编号： | 1004-6429（2007）05-0047-02 |
| 修稿时间： | 2007-08-03 |
MEMS Devices and Their Application in Communications |
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| Tu Ligang.MEMS Devices and Their Application in Communications[J].Shanxi Science and Technology,2007(5):47-47,50. |
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| Authors: | Tu Ligang |
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| Abstract: | The electronics industry has become the world's largest industry.Electronic devices are the basis for the development of electronics industry,whose development is very quick,with new devices,new effects and new technologies everyday.Semiconductor devices are now measured in microns.In recent years the emergence and development of MEMS(micro-electronic mechanical systems) devices have gained concern of industrial countries.The article introduces the characteristics of MEMS and its application in communications. |
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| Keywords: | MEMS |
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