| 铝原子在多晶硅晶粒间界分凝的AES研究 |
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| 引用本文： | 有洪星,刘光廷,简耀光,邵力为. 铝原子在多晶硅晶粒间界分凝的AES研究[J]. 东南大学学报(自然科学版), 1988, 0(4) |
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| 作者姓名： | 有洪星 刘光廷 简耀光 邵力为 |
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| 作者单位： | 南京电子器件研究所，南京工学院电子工程系，南京工学院电子工程系，南京工学院电子工程系 |
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| 摘 要： | 多晶硅目前正广泛地应用于大规模集成电路、P-N结器件和太阳电池等领域之中,但是,由于多晶硅中存在着大量的晶粒间界,晶粒间界既是多数载流子输运的阻挡势垒,又是少数载流子的陷井和复合中心,所以,晶粒间界的存在严重地影响着多晶硅及其器件的电学特性。然而,有些掺杂原子在多晶硅晶粒间界的分凝会使多晶硅的物理和电学特性得到改善,并为找到降低和消除多晶硅晶粒间界的影响的方法指明方向。
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Study of Aluminum Atom Segregation at Grain Boundary of Polycrystalline Silicon by AES |
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| You Hongxing Liu Guangting Jian Yaoguang Shao Liwei. Study of Aluminum Atom Segregation at Grain Boundary of Polycrystalline Silicon by AES[J]. Journal of Southeast University(Natural Science Edition), 1988, 0(4) |
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| Authors: | You Hongxing Liu Guangting Jian Yaoguang Shao Liwei |
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| Affiliation: | Department of Electronic Engineering |
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| Abstract: | In the paper, the experimental evidence of the Aluminum atom segregation to the grain boundaries of the directional-solidification polycrystalline silicon is given, for the first time, by Auger Electron Spectroscopy(AES). The phenomenon of the Aluminum atom segregation is studied based on the Auger point, line, section and depth analyses. The Aluminum atom segregation depends on the structure of polyerystalline silicon, the temperature of Aluminum and the properties of Aluminum atom. |
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| Keywords: | segregation grain boundary solid solubility. |
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