| 二维工作台正交性检测 |
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| 引用本文： | 陈琦. 二维工作台正交性检测[J]. 吉林工学院学报, 2014, 0(6): 720-722 |
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| 作者姓名： | 陈琦 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,吉林长春,130033 |
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| 基金项目： | 国家重大科研仪器设备研制专项 |
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| 摘 要： | 应用非接触式电容测微仪以及平晶与多齿分度盘组合,检测二维工作台的正交性。调试为下层台200mm、上层台300mm行程时的正交性小于±0.5″,满足要求。
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| 关 键 词： | 正交性 电容测微仪 多齿分度盘 平晶 |
OrthogonaI testing for 2D worktabIe |
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| CHEN Qi. OrthogonaI testing for 2D worktabIe[J]. Journal of Jilin Institute of Technology, 2014, 0(6): 720-722 |
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| Authors: | CHEN Qi |
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| Affiliation: | CHEN Qi (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China) |
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| Abstract: | With contactless capacitance micrometer and assembly of flat and multi‐tooth dividing disc , we detect the orthogonality of a 2D worktable .The result is that orthogonality is less than 0 .5＆quot; at 200 mm‐stroke in lower working table and 300 mm‐stroke upper . |
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| Keywords: | orthogonal capacitance micrometer multiple tooth dividing disc flat crystal |
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