| 光电式光栅刻划机干涉控制系统及精度分析 |
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| 引用本文： | 张成山,孟庆孔.光电式光栅刻划机干涉控制系统及精度分析[J].吉林工学院学报,2014(6):633-638. |
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| 作者姓名： | 张成山 孟庆孔 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
2. 北方信息控制集团有限公司,江苏南京,211153 |
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| 基金项目： | 国家重大科学仪器设备开发专项资金资助项目(2011YQ120023)；国家重大科研仪器设备研制专项资金资助项目 |
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| 摘 要： | 采用莫尔条纹法对光栅干涉仪在工作过程中产生的干涉条纹进行分析,利用莫尔条纹的平均误差作用减少光栅刻划过程中的局部误差。实验研究表明,该方法控制光栅刻划机刻划出300l/mm和600l/mm的光栅,受环境影响小、结构简单且装调方便。
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| 关 键 词： | 光电式光栅刻划机 衍射光栅干涉仪 莫尔条纹 |
Interference controI system and accuracy anaIysis of photoeIectric grating ruIing engine |
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| ZHANG Cheng-shan,MENG Qing-kong.Interference controI system and accuracy anaIysis of photoeIectric grating ruIing engine[J].Journal of Jilin Institute of Technology,2014(6):633-638. |
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| Authors: | ZHANG Cheng-shan MENG Qing-kong |
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| Institution: | ZHANG Cheng-shan , MENG Qing-kong (1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China 2. North Information Control Group Co. , Ltd, Nanjing 211153, China) |
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| Abstract: | With Moire fringe average error method ,interference fringes produced in the operation of grating interferometer are analyzed to reduce the local error . Experimental studies show that 300 l/mm and 600 l/mm gratings are ruled out with the method ,and the grating ruling engine control system using moire fringe method have low environmental impact ,simple structure and is simple , easily adjusted and influenced less by the environment . |
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| Keywords: | photoelectric grating ruling engine diffraction grating interferometer moire |
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