基于压电石英晶片扭转效应的扭矩传感器原理与研制

发明了一种基于压电石英晶片扭转效应的扭矩传感器,介绍了其理论基础、扭转束缚电荷密度分布规律与电极的粘贴方法,以及扭矩传感器性能标定.该传感器同其他石英扭矩传感器相比,突出特点是采用石英晶片的扭转效应而不是通常采用的剪切效应来建构的.整个扭矩晶组仅由3片普通Y0°切型的石英晶片组成,采用分割电极法布置检测电极,晶组的组成方式能够减小或避免径向力和轴向力的横向干扰,同时又能提高传感器的灵敏度.经标定该传感器的技术指标全面达到CIRP-STCC规定的测力仪使用标准.

Principle and manufacture of torque sensor based on torsion effect of piezoelectric quartz disc

A new type of torque sensor is invented. Its theoretical foundation, the distribution of bound and surface charge densities by torsion, the arrangement manner of detection electrodes and calibration are investigated. The outstanding features of the torque sensor contrary to other type of quartz torque sensor are: the torque sensor adopts torsion effect of quartz disc rather than shear effect. Only three Y0-cut discs are used in the torsion quartz measuring cell of the torque sensor. The sensor applies partitioned electrode method to the arrangement of detection electrodes, which can avoid or reduce the cross talk of an axial and arbitrary radial force, and at the same time improve sensitivity. After static calibration, the torque sensor has fully reached the dynamometer standard stipulated by CIRP-STCC.