| 氮气介质阻挡微放电中活性物种的诊断研究 |
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| 引用本文： | 刘鑫,常晓玲,徐勇,张晓光,杨学锋. 氮气介质阻挡微放电中活性物种的诊断研究[J]. 大连民族学院学报, 2010, 12(1): 44-47 |
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| 作者姓名： | 刘鑫 常晓玲 徐勇 张晓光 杨学锋 |
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| 作者单位： | 光电系统信息控制技术国家级重点实验室,河北,三河,065201;大连理工大学,等离子体物理化学实验室,辽宁,大连,116024;光电系统信息控制技术国家级重点实验室,河北,三河,065201;大连理工大学,等离子体物理化学实验室,辽宁,大连,116024 |
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| 基金项目： | 国家自然科学基金资助项目(10475015) |
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| 摘 要： | 利用三极差分抽气分子束质谱装置在亚大气压介质阻挡放电产生的氮等离子体中观测到,粒子流中的主要离子成分是N^＋,N2^＋,并且分别研究了放电气压、放电电压、放电重复频率对氮等离子体中N^＋与N2^＋活性物种离子流强度的影响。结果显示,N^＋的离子流强明显高于N2^＋,主要是由于产生的N^＋和时在电场作用下向阴极板运动时,N2^＋会与中性粒子及电子碰撞发生反应而进一步生成了N^＋,并且N^＋与啊流强随放电电压、放电频率的增大而增大,N^＋,N2^＋的相对浓度几乎不变,而随N2压力变化N^＋与N2^＋流强会出现一个极值。进而对该现象的产生、检测和形成机制进行了研究。
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| 关 键 词： | 介质阻挡放电 丝状放电 分子束质谱诊断 N+ N+2 |
Study on Diagnosis of Active Species in Nitrogen Dielectric Barrier Microdischarges by Molecular Beam Mass Spectrometry |
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| LIU Xin,CHANG Xiao-ling,XU Yong,ZHANG Xiao-guang,YANG Xue-feng. Study on Diagnosis of Active Species in Nitrogen Dielectric Barrier Microdischarges by Molecular Beam Mass Spectrometry[J]. Journal of Dalian Nationalities University, 2010, 12(1): 44-47 |
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| Authors: | LIU Xin CHANG Xiao-ling XU Yong ZHANG Xiao-guang YANG Xue-feng |
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| Affiliation: | 1.National Lab of Electro-optic System Technology;Sanhe Hebei 065201;China;2.Laboratory of Plasma Physical Chemistry;Department of Chemical Engineering;Dalian University of Technology;Dalian Liaoning 116024;China |
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| Abstract: | With the three-stage differentially pumped molecular beam mass spectrometer,it was observed in the nitrogen plasma generated by dielectric barrier discharge(DBD) at sub-atmospheric pressure that the main ions in the particle flow were N+2 and N+.And the effects of the discharge air pressure/voltage/frequency on the fluxes of active species,that is,N+2 and N+,in the nitrogen plasma were studied.The result showed that the flux of N+ was significantly higher than that of N+2.It is primarily because when N+ and... |
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| Keywords: | DBD filamentary discharge molecular beam mass spectrometry N+ N+2 |
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