| 汽相沉积薄膜过程的计算机模拟 |
| |
| 引用本文： | 林玉枝.汽相沉积薄膜过程的计算机模拟[J].福州大学学报(自然科学版),1996(5):35-38. |
| |
| 作者姓名： | 林玉枝 |
| |
| 作者单位： | 福州大学电子科学与应用物理系 |
| |
| 摘 要： | 利用计算机模拟给出汽相沉积薄膜的过程，计算出不同模型下的薄膜微观结构，并对薄膜微观结构特征进行了讨论
|
| 关 键 词： | 汽相沉积 薄膜 计算机模拟 |
Vapor-Deposit Thin Film Process by Means of a Computer Simulation |
| |
| Lin Yuzhi.Vapor-Deposit Thin Film Process by Means of a Computer Simulation[J].Journal of Fuzhou University(Natural Science Edition),1996(5):35-38. |
| |
| Authors: | Lin Yuzhi |
| |
| Institution: | Lin Yuzhi (Department of Electronic Science and Applied Physics,Fuzhou University,Fuzhou,350002) |
| |
| Abstract: | This paper gives the process of vapor-deposited thin films by means of a computer simulation. Thin film microstructure of various models has been computed.The microstructure feature of thin films is discussed. |
| |
| Keywords: | vapor-deposite thin films computer simulation |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《福州大学学报(自然科学版)》浏览原始摘要信息 |
| 点击此处可从《福州大学学报(自然科学版)》下载免费的PDF全文 |
