| MEMS光纤压力传感器压力膜片的仿真与分析 |
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| 引用本文： | 祝彦,潘亚涛,刘光辉,李小亭. MEMS光纤压力传感器压力膜片的仿真与分析[J]. 河北大学学报(自然科学版), 2020, 40(2): 132-136. DOI: 10.3969/j.issn.1000-1565.2020.02.004 |
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| 作者姓名： | 祝彦 潘亚涛 刘光辉 李小亭 |
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| 作者单位： | 河北大学质量技术监督学院,河北保定071002;河北大学物理科学与技术学院,河北保定071002,河北大学质量技术监督学院,河北保定071002,河北省保定市交通运输局公路设备维护处,河北保定071000,河北大学质量技术监督学院,河北保定071002 |
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| 基金项目： | 教育部春晖计划;河北省自然科学基金 |
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| 摘 要： | 阐述了一种使用周边固定的圆形膜片的反射式强度调制型MEMS光纤压力传感器的工作原理,在现有外界压力下的膜片应力、应变及固有频率公式的基础上,推导了膜片应力、应变和固有频率三者随传感器尺度变化的一般规律.利用有限元分析软件ANSYS对推演出的规律仿真模拟和分析,验证了此规律的正确性和普适性,同时修正分析模型,总结了理论公式与实际应用之间的联系与区别.
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| 关 键 词： | 圆形膜片 光纤压力传感器 有限元分析 修正模型 |
| 收稿时间： | 2019-01-01 |
Simulation and analysis of pressure membrane of MEMS fiber optic pressure sensor |
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| ZHU Yan,PAN Yatao,LIU Guanghui,LI Xiaoting. Simulation and analysis of pressure membrane of MEMS fiber optic pressure sensor[J]. Journal of Hebei University (Natural Science Edition), 2020, 40(2): 132-136. DOI: 10.3969/j.issn.1000-1565.2020.02.004 |
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| Authors: | ZHU Yan PAN Yatao LIU Guanghui LI Xiaoting |
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| Affiliation: | 1.College of Quality and Technical Supervision, Hebei University, Baoding 071002, China; 2.College of Physics Science and Technology, Hebei University, Baoding 071002, China; 3.Department of Highway Equipment Maintenance of Transportation Bureau of Hebei Province, Baoding 071000, China |
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| Abstract: | The working principle of a reflective intensity modulated MEMS fiber pressure sensor is described using circular thin film with fixed circumference.Based on the existing formulas of membrane stress,strain and natural frequency under external pressure,a general law of the change of the diaphragm with the sensor scale is derived.The simulation and analysis of the deduced law by using the finite element analysis software ANSYS verify the correctness and universality of the law.At the same time,the analysis model is revised,and the relation and difference between theoretical formula and practical application are summarized. |
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| Keywords: | circular diaphragm fiber optic pressure sensor finite element analysis modified model |
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