纳米精度MEMS平面运动测量技术

为实现MEMS谐振器在周期运动过程中各个时刻的运动特性及其动态特性参数的纳米精度测量，提出了一种基于块匹配的最优根值亚像素运动估计测量方法．该方法在双线性插值细分技术基础上，将物体亚像素位移的定位转换为求解方程的最优根值的方式，通过最小均方差法获得物体运动位移的纳米级分辨力测量结果．该算法避免了传统算法中由于迭代所引起的大量运算．利用该算法对MEMS器件的运动历程做分析，得到特定驱动频率下MEMS器件的幅度-相位曲线．实验结果表明，采用该方法得到的平面位移测量分辨力为5nm．

A Novel Nanoscale Measurement Technique of MEMS In-Plane Motion

In order to realize nanoscale measurement of dynamic parameters of micro-electro-mechanical system （MEMS） resonator and get motion characteristics in every moment, a sub-pixel motion estimation measurement method of optimum root value was proposed based on block matching. According to bilinear interpolation subdivision technology, sub-pixel displacement positioning of object was measured through calculating optimum roots of equation. Nanoscale resolution of displacement was obtained using the least mean square error method. Therefore, a large number of calculations caused by iteration in traditional algorithm were avoided. The motion course of MEMS resonator was analyzed by the proposed method, and the amplitude-phase curve of MEMS resonator was got in special driving frequency. Experimental results indicate that the resolution of planar displacement is 5 nm by using the proposed method.