光电集成加速度地震检波器及其信号处理系统

研制出光电集成加速度地震检波器及其数字信号处理系统。该检波器将光波导M-Z干涉仪、十字横梁硅质量块简谐振子、光波导偏振器单片集成在同一硅基底上,并与光源、光电探测器、信号处理电路混合集成。数字信号处理系统以TI公司的高性能数字信号处理（DSP）芯片为核心,辅以必要的电路,实现了对加速度信号的高精度检测和误差信号的补偿。完成了实验样机的研制,测试结果表明主要性能指标达到设计要求。

Photo-electronic Integrated Acceleration Seismometer and Digital Signal Processing System

Photo-electronic integrated acceleration seismometer and its digital signal processing system are researched and developed. The silicon crystal is adopted as the substrate. The M-Z interferometer, harmonic oscillator, TE mode polarizer and acousto-optic phase modulation are integrated on the silicon substrate. And the LD, the PIN detecting, processing circuit are hybrid-integrated in the system. As an advanced quality digital signal processing (DSP) chip equipped with necessary circuits is used in its digital signal processing system, a high accurate detection of the acceleration signal is achieved and the environmental interference signal is effectively compensated. The prototype is accompleted and tested, and most design requirements are achieved.