| 梯度过渡层对TiC薄膜中残余应力影响的研究 |
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| 引用本文： | 王张敏 李戈扬. 梯度过渡层对TiC薄膜中残余应力影响的研究[J]. 上海交通大学学报, 1995, 29(5): 193-197 |
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| 作者姓名： | 王张敏 李戈扬 |
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| 摘 要： | 用平行光束掠射法（ＧＩＸＤ）测定了磁控溅射ＴｉＣ（Ａｌ基体）膜中的残余应力，比较了不同厚度的梯度过渡层对残余应力的影响。
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| 关 键 词： | 残余应力 薄膜 掠射法 碳化钛 梯度过渡层 GIXD |
A Study of the Effect of Gradient Interlayer on the Residual Stress in TiC Thin Films |
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| Qi Xuan, Wang Zhangmin, Li Geyang, Li Penxing, Wu Renjie. A Study of the Effect of Gradient Interlayer on the Residual Stress in TiC Thin Films[J]. Journal of Shanghai Jiaotong University, 1995, 29(5): 193-197 |
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| Authors: | Qi Xuan Wang Zhangmin Li Geyang Li Penxing Wu Renjie |
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| Affiliation: | Qi Xuan; Wang Zhangmin; Li Geyang; Li Penxing; Wu Renjie |
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| Abstract: | The residual stresses in TiC thin films made by the magnetron-sputtering were measured by using an X-ray grazing method with parallel beams, and the effect of gradient interlayer between the film and the substrate with different thickness on the residual stress in TiC thin films was investigated. |
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| Keywords: | residual stress thin film grazing X-ray diffraction(GXRD) |
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