| 用RF—PECVD制备的SnO2薄膜光电性质及化学成分 |
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| 引用本文： | 陈俊芳 刘彭义. 用RF—PECVD制备的SnO2薄膜光电性质及化学成分[J]. 暨南大学学报(自然科学与医学版), 1999, 20(5): 4-7 |
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| 作者姓名： | 陈俊芳 刘彭义 |
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| 作者单位： | [1]华南师范大学物理系 [2]暨南大学物理系 |
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| 基金项目： | 广东省自然科学基金；国务院侨办重点学科科研基金 |
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| 摘 要： | 利用ＸＰＳ研究了ＲＦ－ＰＥＣＶＤ制备ＳｎＯ２薄膜的化学计量配比，测试了ＳｎＯ２薄膜的光学和电加热特性。结果表明：具有导电性能的ＳｎＯ２薄膜是一种非理想化学计量配比的氧化物半导体薄膜材料，薄膜还具有较高的可见光透过率和较好的电加热性能。
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| 关 键 词： | 薄膜 化学计量配比 二氧化锡 PECVD |
Study on optical, electrical properties and stoichiometry of SnO 2 thin films by RF-PECVD |
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| CHEN Jun-fang ,LIU Peng-yi. Study on optical, electrical properties and stoichiometry of SnO 2 thin films by RF-PECVD[J]. Journal of Jinan University(Natural Science & Medicine Edition), 1999, 20(5): 4-7 |
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| Authors: | CHEN Jun-fang LIU Peng-yi |
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| Affiliation: | CHEN Jun-fang 1,LIU Peng-yi 2 |
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| Abstract: | The SnO 2 thin film was prepared by means of RF-PECVD and its stoichiometric relation is calculated by XPS. Its optical and electric heating properties are measured. The results indicate that this conducting SnO 2 thin film is a kind of non-stoichiometric n-type oxide semiconductor and SnO 2 thin film has high visible light transmittance and good electric heating properties. |
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| Keywords: | RF-PECVD transparent conducting thin film stoichiometry |
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