高功率准分子激光沉积类金刚石膜的热稳定性

在不同温度下(200~ 800 ℃) 将高功率准分子激光溅射方法沉积的类金刚石膜进行退火实验. 利用Raman和XPS光谱分析类金刚石膜在退火过程中的化学键合结构变化. 结果表明, 类金刚石膜是由少量的sp² C键和大量的sp³ C键组成的非晶态碳膜. 在退火温度小于600 ℃范围内, 类金刚石膜的热稳 定性较好； 退火温度高于600 ℃时, 类金刚石膜中的sp³ C键逐渐向sp ² C键转变, 当退火温度升到800 ℃时, 类金刚石膜中sp³ C键含量由 退火前的大约70%下降到40%. 可见, 高温退火能导致类金刚石膜的石墨化趋势.

Thermal Stability of Diamond-like Films Deposited by High Power Excime Laser

The diamond-like films deposited by high power excime laser were annealed at different temperatures (200~800 ℃) to study their therm al stability. Raman and XPS spectra were used to characterize the change of the chemical bonding structure of the diamond-like films annealed at different temperatures. The results show that the diamond-like films are composed of fewer sp² C bonds and larger sp³ C bonds fractions. When annea ling temperature was varied in the range of 200~600 ℃, the films have a good thermal stability. But when annealing temperature was increased continually from 6 00 ℃ to 800 ℃, the transformation from sp³ C to sp² C occurred in the films. Thus, higher temperature annealing can lead to the formation of larger fractions of sp² C in the films, the content of sp ³ C drops from about 70% to 40% as annealing temperature is increased from 200 ℃ to 800 ℃.