超精密点对点运动3阶轨迹规划算法与实现

分析了3阶轨迹轮廓可能存在的各种情形,在总结各种轨迹情形图形特征的基础上,建立了用来预判别以上情况的3个基准:速度-加速度准则、距离-加速度准则和距离-速度准则.依据该基准与给定系统约束,提出了一种轨迹全过程的快速预处理方法,实现了点对点运动时间优化;结合轨迹轮廓图形的对称性与面积求积分法,给出了一种简单的公式推导方法.在此基础上,给出了3阶轨迹规划的精确算法及其实现流程.实例证明了该算法的快速性、有效性、可靠性及灵活性.该算法已成功应用于超精密半导体加工装备的研发中.

Third-order profile planning algorithm and implementation for high accuracy point-to-point motion

All available instances for third-order profile planning firstly were analyzed.To identify that,three criteria were presented relying on profile characteristics.Hereafter a fast preprocessing approach considering the profile as a whole was given based on three criteria above and system constraints.And also time-optimality of the profile was obtained.The relevant formulas were easily derived with combination geometrical symmetry of profile and area method.As a result,accurate algorithm and its implementation procedure were proposed.Experimental results show the effectiveness and precision of the proposed methods.Practically,the proposed methods have been in successful use for semiconductor manufacturing equipments.