先行分离直行运动误差的二次相移三点法

现代检测与补偿技术越来越要求测量的高精度和实时性，通过直接获取运动误差以避免误差残留的二次相移三点法，为运动误差的在线高精度检测提供了一条有效途径。通过对3个传感器的测量数据按照二次相移原则进行数据重组，在数据处理的首次操作时消除直线形状误差的影响，从而在反滤波基础上可以先行分离出直行运动误差的平移分量和转动分量。利用权函数对比分析，证明了二次相移三点法与先行分离形状误差的直线频域三点法在本质上的同源性和统一性。实验结果表明，该方法可以较好地分离出直行运动误差和直线形状误差。

Quadratic Phase Shift Three-Point Method Through Which Linear Motion Error Can Be Separated and Gained Firstly

To implement high precision and on line measurement of linear motion errors, a novel error separation technique(EST) method named quadratic phase shift three point method was proposed, which is based on the data reconstruction and inverse filtering. According to the principle of quadratic phase shift, the data from three probes are reconstructed, and the influence of form error can be eliminated, so the linear error motion can be separated and gained firstly on the basis of inverse filtering. Comparative analysis of the weighting function proves the homology and unitarity between the common frequency three point method and the proposed method. Satisfactory effects were achieved by some experiments.