| 超精密加工中的微位移技术 |
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| 引用本文： | 马淑梅,陈彬. 超精密加工中的微位移技术[J]. 同济大学学报(自然科学版), 2000, 28(6): 684-687 |
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| 作者姓名： | 马淑梅 陈彬 |
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| 作者单位： | 1. 同济大学,机械工程系,上海,200092
2. 中国外汇交易中心,工程技术部,上海,200002 |
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| 摘 要： | 微位移技术是实现超精密加工的重要途径，据此介绍了微位移的实现方法，并对压电陶瓷微位移机构系统作了进一步的介绍，阐述了系统的组成、工作原理、结构及特点．最后进行了采用MCS-51系列单片机控制的压电陶瓷微位移机构闭环控制系统来提高工件的面形精度的实验．结果表明，工件的面形精度提高了50％以上．
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| 关 键 词： | 微位移技术 超精密加工 压电陶瓷 |
| 文章编号： | 0253-374X(2000)06-0684-04 |
| 修稿时间： | 1999-07-05 |
Micro-displacement Technique in the Ultra-precision Machining |
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| MA Shu-mei,CHEN Bin. Micro-displacement Technique in the Ultra-precision Machining[J]. Journal of Tongji University(Natural Science), 2000, 28(6): 684-687 |
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| Authors: | MA Shu-mei CHEN Bin |
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| Abstract: | Micro-displacement technique is the important track to realize the ultra-precision machining. This paper introduces the method of realizing micro-displacement, and gives more introduction to the system of piezodectic ceramics micro-displacement mechanism. The system's working principle,structure,characteristics are showed. Finally, an experiment is done adopting piezodectic ceramics micro-displacement mechanism closed-loop controlling system controlled by MCS-51 single-chip computer to advanced workpiece's surface form precision. The result indicated that the workpiece's surface form precision advanced over 50%. |
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| Keywords: | micro-displacement technique ultra-precision machining piezodectic ceramics |
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