四自由度组合柔性铰链的设计及性能分析

设计一种由3个柔性铰链组成的,用于高精密磨床的微位移工作平台.通过3个柔性铰链对输入位移进行缩小,呈线性地输出,实现在工件定位过程中对(→overX)平移、(→overZ)平移、X^︵旋转、Z^︵旋转4个方向自由度的微小位移及角度调整的功能.优选3个柔性铰链所使用的材料,运用ANSYS仿真软件分析3个柔性铰链输入位移与输出位移、输出角位移之间的响应关系,以及工作过程中各个柔性铰链内部的应力大小.结果表明:工作台(→overX)方向,(→overZ)方向的输出输入位移比分别为0.137,0.286 μm·μm^-1;X^︵旋转,Z^︵旋转的输出输入位移比分别为6.516×10^-4,2.180×10^-3(°)·μm^-1;在零件最大加载位移以内,输出响应与输入位移之间都呈现良好的线性关系,误差均在0.1%以内.

Design and Performance Analysis of Flexible Hinges With Four Degrees of Freedome

A micro-displacement worktable with three flexible hinges has been designed in this study. Its degrees of freedom along linear((→overX),(→overZ))axes, around rotary(X^︵, Z^︵)axes can be adjusted for fine positioning of small parts machined by high-precision grinding machine. The materials of three flexible hinges have been selected under consideration of equal life design of parts. The response relationships between output linear/angular displacement and input displacement have been analyzed by using finite element software ANSYS. The ratios of output linear displacement along(→overX),(→overZ)axes to input displacement are 0.137, 0.286 μm·μm^-1, respectively, and those of output angular displacement around X^︵ and Z^︵ axes to input displacement are 6.516×10^-4, 2.180×10^-3(°)·μm^-1, respectively. Within the maximum load displacement range, the relationships between output displacement and input displacement are linear, and the linearity errors are less than 0.1%.