| 星用高精度压力传感器设计 |
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| 引用本文： | 崔宏敏,张丽娟,王凡.星用高精度压力传感器设计[J].哈尔滨商业大学学报(自然科学版),2004,20(3):300-304. |
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| 作者姓名： | 崔宏敏 张丽娟 王凡 |
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| 作者单位： | 中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001;中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001;中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001 |
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| 摘 要： | 介绍了星用高精度压力传感器的技术要求、工作原理、结构设计与电路设计及试验结果；对研制过程中的关键技术及解决方法进行了探讨．传感器是依据硅微压阻效应原理，采用相关半导体平面工艺技术、微机械加工技术以及电子线路中信号调理与补偿技术，将压力敏感元件与调理电路一体化封装在壳体内．传感器具有非线性好、工作温度范围宽、抗冲击过载、性能稳定可靠等特点．
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| 关 键 词： | 卫星 高精度 压力 压阻式 传感器 |
| 文章编号： | 1672-0946(2004)03-0300-05 |
| 修稿时间： | 2004年4月26日 |
Study on high precision pressure transducer used in satellite |
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| CUI Hong-min,ZHANG Li-juan,WANG Fan.Study on high precision pressure transducer used in satellite[J].Journal of Harbin University of Commerce :Natural Sciences Edition,2004,20(3):300-304. |
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| Authors: | CUI Hong-min ZHANG Li-juan WANG Fan |
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| Abstract: | This paper has discussed the working theory and technical arts and structure of the high resolation pressure transducer used in satelite,and submittes the resolution method towards the problems occurred in the key technology within the procedure of R&D. Based on the techniques, the pressure sensor and modulating circuit were sealed within the shell. The transducer has many excellent characters, such as high line, wide range of work temperature, shock and overload proof and stable performance. |
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| Keywords: | satellite high precision pressure piezoresistance transducer |
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