| 金刚石纳米粉引晶方法制备金刚石薄膜方法 |
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| 引用本文： | 陈庆东,杨传径,王辉,刘才龙.金刚石纳米粉引晶方法制备金刚石薄膜方法[J].河南科技大学学报(自然科学版),2010,31(2):16-19. |
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| 作者姓名： | 陈庆东 杨传径 王辉 刘才龙 |
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| 作者单位： | 1. 河南科技大学,物理与工程学院,河南,洛阳,471003
2. 吉林大学,超硬材料国家重点实验室,吉林,长春,130012 |
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| 基金项目： | 国家自然科学基金项目(40473034) |
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| 摘 要： | 利用金刚石纳米粉引晶法和常规研磨方法分别在单晶硅衬底上制备金刚石薄膜,并采用扫描电镜、激光拉曼方法对所制备样品进行表征,通过SEM和拉曼谱分析,与研磨法生长金刚石薄膜相比,利用金刚石纳米粉引晶方法可以大大提高金刚石薄膜的成核速度,生长速率达到2μm/h以上。对相同碳源浓度下生长的金刚石薄膜样品的SEM和拉曼谱分析,采用引晶法生长的金刚石薄膜质量明显高于研磨法。
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| 关 键 词： | 金刚石纳米粉 金刚石薄膜 热丝CVD 研磨法 纳米引晶 |
Preparation of Diamond Film by Seeding with Nanocrystalline Diamond Powder |
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| CHEN Qing-Dong,YANG Chuan-Jing,WANG Hui,LIU Cai-Long.Preparation of Diamond Film by Seeding with Nanocrystalline Diamond Powder[J].Journal of Henan University of Science & Technology:Natural Science,2010,31(2):16-19. |
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| Authors: | CHEN Qing-Dong YANG Chuan-Jing WANG Hui LIU Cai-Long |
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| Institution: | 1.College of Physics & Engineering/a>;Henan University of Science & Technology/a>;Luoyang 471003/a>;China/a>;2.State Key Laboratory of Superhard Materials/a>;Jilin University/a>;Changchun 130012/a>;China |
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| Abstract: | A novel process was proposed to grow the diamond films by seeding with nano-diamond powder.The samples were characterized by scan electron microscope and laser Raman spectrometry.Comparing to the diamond films prepared by the custom grinding method,the nucleation rate and quality of the diamond films were distinctly improved by seeding with nano-diamond powder. |
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| Keywords: | Nano-diamond powder Diamond films Hot filament CVD Grinding method Seeding with nano-diamond powder |
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