首页 | 本学科首页   官方微博 | 高级检索  
     检索      


Progress in modeling of fluid flows in crystal growth processes
Authors:Qisheng Chen  Yanni Jiang  Junyi Yan  Ming Qin
Institution:Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China
Abstract:Modeling of fluid flows in crystal growth processes has become an important research area in theoretical and applied mechanics. Most crystal growth processes involve fluid flows, such as flows in the melt, solution or vapor. Theoretical modeling has played an important role in developing technologies used for growing semiconductor crystals for high performance electronic and optoelectronic devices. The application of devices requires large diameter crystals with a high degree of crystallographic perfection, low defect density and uniform dopant distribution. In this article, the flow models developed in modeling of crystal growth processes such as Czochralski, ammonothermal and physical vapor transport methods are reviewed. In the Czochralski growth modeling, the flow models for thermocapillary flow, turbulent flow and MHD flow have been developed. In the ammonothermal growth modeling, the buoyancy and porous media flow models have been developed based on a single-domain and continuum approach for the composite fluid-porous layer systems. In the physical vapor transport growth modeling, the Stefan flow model has been proposed based on the flow-kinetics theory for the vapor growth. In addition, perspectives for future studies on crystal growth modeling are proposed.
Keywords:Modeling  Crystal growth  Fluid flow  Czochralski growth  Ammonothermal growth  Physical vapor transport
本文献已被 维普 万方数据 ScienceDirect 等数据库收录!
点击此处可从《自然科学进展(英文版)》浏览原始摘要信息
点击此处可从《自然科学进展(英文版)》下载免费的PDF全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号