椭偏法研究ZrO2薄膜的宽光谱特性

摘要：为了获得ZrO2薄膜的光学常数，采用了德国SENTECH生产的SE850宽光谱反射式光谱型椭偏仪，测量和分析了用光控自动真空镀膜机沉积在K9玻璃基底上的两个单层ZrO2薄膜样品，得到了ZrO2薄膜在300nm?2500nm宽谱上的光学常数曲线和薄膜厚度。结果表明：样品1采用Cauchy模型和Tauc-Lorentz模型得到的厚度和光学常数结果一致；对样品2把单层ZrO2薄膜分成三层得到的均方差（MSE）比没有分层的均方差少0.381，分层得到的ZrO2薄膜的厚度的测量值与TFCalc软件的计算值非常接近，同时得到薄膜的折射率曲线。该研究结果对应用ZrO2薄膜多层膜膜系设计和制备有参考价值。

Study on the wide spectrum properties of ZrO2 films with ellipsometry

Abstract: In order to obtain the optical constants of ZrO2 thin film, two single-layer ZrO2 film samples deposited on K9 glass by optical automatic vacuum coating machine were measured and analyzed with a broadband ellipsometer SE850 produced by SENTECH. Then, the thickness of ZrO2 thin film and optical constants curve on the 300nm?2500nm spectrum were got. The results show that for sample 1 the thickness and optical constants got from Cauchy model were same as Tauc-Lorentz model. For sample 2, the film divided into three layers had the smallest mean square error, and the thickness of ZrO2 thin film measured value was closest to the calculated value of TFCalc software, at the same time got the refractive index curve of the thin film. The results have certain reference value to the multilayer design and the preparation of ZrO2 thin film.