| 微位移器在液压系统中的应用 |
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| 引用本文： | 王明德
,邢鸿斌.微位移器在液压系统中的应用[J].兰州理工大学学报,1987(2). |
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| 作者姓名： | 王明德 邢鸿斌 |
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| 作者单位： | Wang Mingde，Xing Hongbing |
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| 摘 要： | 本文提出利用压电陶瓷的逆效应制作微位移器,作为液压伺服系统的高精度、高分辨率主轴的控制信号发生器。文中将其用于测定静压轴承的动特性,获得了满意的效果。同时用于磨头的轴向伺服补偿。分辨率可达0.25μm,精度可达0.12μm,并且具有可靠的重复性精度,这就给亚微米级控制系统提供了一条可行的途径。
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| 关 键 词： | 压电陶瓷 微小位移 液压系统 逆效应 控制信号 |
The Application of a Microdisplacement Instrument to Hydraulic Servo System |
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| Wang Mingde,Xing Hongbing.The Application of a Microdisplacement Instrument to Hydraulic Servo System[J].Journal of Lanzhou University of Technology,1987(2). |
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| Authors: | Wang Mingde Xing Hongbing |
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| Abstract: | The application of reverse effect of piezoelectric crystal is presented in this paper.The effect is used in control signal generator of spindle to get high accuracy and high resolution in hydraulic servo system.With the help of the piezoelectric crystal, dynamic characteristics of hydrostatic bearing has been detected and the result of the experiment is satisfactory. At the same time, it is used for compensation the error of grinding head with hydrostatic bearing. The resolution is up to 0.25um and the accuracy to 0.12um.Besides, it has reliable repetition accuracy and presents a possible way of submicrometre control is given in. |
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| Keywords: | piezoelectric crystal microdisplacement hydraulic servo system reverse effect control signal |
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