Al2O3陶瓷表面二元离子复合渗镀Ni-Ti合金化研究

运用多元离子复合渗镀合金的方法,采用自制的二元复合靶对Al2O3陶瓷表面进行Ni-Ti复合渗镀,实现了Al2O3陶瓷表面的合金化。采用EDS,SEM,XRD分析方法和声发射划痕试验对Al2O3陶瓷表面的沉积层进行了分析,研究了沉积层成分、物相以及界面结合强度。结果表明,沉积层中含有镍、钛、铁等元素,各元素分布较为均匀,没有明显的成分聚集现象;沉积层由镍钛的氧化物Ni[TiO3]、镍钛化合物Ni4Ti3、镍单相组成。沉积层与Al2O3陶瓷基体界面成分过渡连续,没有显著的微观和宏观缺陷;声发射划痕实验结果表明,沉积层与陶瓷基体结合得较好,在100N的最大载荷下,沉积层没有出现剥离和崩落现象。这一方法为Al2O3陶瓷表面合金化提供了新的途径。

Research of the Surface Metallization of Al2O3 Ceramic by Means of Binary Composite Diffusion Ni-Ti Composite Diffusion Coating

In this paper,alloying on the surface of Al_2O_3 ceramic was carried out by means of binary composite diffusion coating alloying technology,in which Ni-Ti binary composite target was applied.The diffusion coating alloy-layer and the combining interface were tested by EDS,SEM,XRD and scratching method.It was indicated that elements of Ni,Ti and Fe of alloy-layer were distributed uniformly;there is no obvious gathering phenomenon of composition.The transition layer of interface between diffusion layer and Al_2O_3 ceramic body was uniform and no macro and micro defects were observed.The result of scratching test indicated that the coating layer is combined well with ceramic body.Under the action of a maximum load of 100N,the alloy-layer of the majority specimen was not stripped and avalanched,all of which has supplied a new way of alloying on the surface of Al_2O_3 ceramic.