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| 多进制圆光栅的研制 | |
| 引用本文： | 喻洪麟.多进制圆光栅的研制[J].重庆大学学报(自然科学版),1991,14(1):104-107. |
| 作者姓名： | 喻洪麟 |
| 作者单位： | 重庆大学光电精密机械研究所 |
| 摘 要： | 讨论了一种新型的多进制圆光栅的设计原理及研制技术,对圆光栅的推广应用和提高光栅的刻划精度及表面质量有一定的实际意义。 |
| 关 键 词： | 圆光栅 多进制 计量 精密测量 |
A NEW DEVELOPMENT OF HIGH PRECISION MANY KIND OF CODE RADIAL GRATINGS |
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| Yu Honglin.A NEW DEVELOPMENT OF HIGH PRECISION MANY KIND OF CODE RADIAL GRATINGS[J].Journal of Chongqing University(Natural Science Edition),1991,14(1):104-107. | |
| Authors: | Yu Honglin |
| Abstract: | The desing principle and the manufacturing method relevant to the high precision many kind of code radial gratings are discussed in this paper. It is helpful to the pratical use for improving the manufacturing precision and surface quality of metrological radial gratings. |
| Keywords: | many kind of code metric radial grating photoetching technique precison mea-surement optical-electricity encoder |
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