| 光散射法测量表面粗糙度的研究 |
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| 引用本文： | 张鸿海,陈志祥,陈日曜.光散射法测量表面粗糙度的研究[J].华中科技大学学报(自然科学版),1987(3). |
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| 作者姓名： | 张鸿海 陈志祥 陈日曜 |
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| 作者单位： | 华中工学院机械工程一系
(张鸿海，陈志祥)，华中工学院机械工程一系(陈日曜) |
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| 基金项目： | 国家教委科学基金资助课题 |
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| 摘 要： | 本文对用光散射方法测量表面粗糙度的原理进行了探讨,研制了表面粗糙度的测量装置.利用该装置对用不同加工方法加工出来的表面粗糙度(R_a=0.02～10μm)进行测量.此外,由于采用了光调制技术,从而克服了照明光、背景光及电噪声对输出信号的影响,故该装置可用于精密切削过程中对加工表面粗糙度的在线监测.
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| 关 键 词： | 表面 粗糙度 测量 光散射法 |
On Measurement of Surface Roughness by Optical Scattering |
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| Zhang Honghai Chen Zhixiang Chen Riyao.On Measurement of Surface Roughness by Optical Scattering[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1987(3). |
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| Authors: | Zhang Honghai Chen Zhixiang Chen Riyao |
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| Institution: | Zhang Honghai Chen Zhixiang Chen Riyao |
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| Abstract: | This paper presents the principle and method of measurement for machined surface roughness by optical scattering, the optical fibre probe and the signal-re-ceiving and processing devices developed by the authors. According to measurement results of surface roughness machined by different methods(Ra=0.02-10nm), it is shown that the output voltage is dependent on the surface roughness Ra. By using the photomodulating technique, the influences of the illuminant light, background light and optical-eleotronic noises on output signals are all eliminated. |
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| Keywords: | Surfaces Coarseness Measurement Light scattering |
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