Microstructure and optical properties of Ag5In5Te47Sb33 phase change thin films with high reflection in thermal annealing process |
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Authors: | Huiyong Liu Fusong Jiang Liqiu Men Zhengxiu Fan Fuxi Gan |
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Affiliation: | LIU Huiyong, JIANG Fusong, MEN Liqiu, FAN Zhengxiuand GAN Fuxi Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China |
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Abstract: | The microstructure and optical properties of Ag-5In-5Te 47Sb 33 phase change films with high reflection in the thermal annealing process were systematically reported. The as_deposited film is amorphous and its crystalline temperature is 160℃. The annealed films are crystalline. The crystalline phases are AgInTe-2, AgSbTe-2 and Sb when annealed at low temperature. When annealed at 220℃, the AgInTe-2 phase disappears and the amount of AgSbTe-2 is the largest. The research of electronic transmission microscopy shows that the morphology of AgSbTe 2 is sphere and that of Sb is bludgeon. The reflection of the annealed films is higher and reaches its peak value at 220℃. |
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Keywords: | Ag-5In-5Te 47Sb 33 phase change films CD_E system RF_magnetron sputtering thermal_induced phase change optical properties. |
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