Microstructure and optical properties of Ag5In5Te47Sb33 phase change thin films with high reflection in thermal annealing process

The microstructure and optical properties of Ag-5In-5Te 47Sb 33 phase change films with high reflection in the thermal annealing process were systematically reported. The as_deposited film is amorphous and its crystalline temperature is 160℃. The annealed films are crystalline. The crystalline phases are AgInTe-2, AgSbTe-2 and Sb when annealed at low temperature. When annealed at 220℃, the AgInTe-2 phase disappears and the amount of AgSbTe-2 is the largest. The research of electronic transmission microscopy shows that the morphology of AgSbTe 2 is sphere and that of Sb is bludgeon. The reflection of the annealed films is higher and reaches its peak value at 220℃.