| 准分子激光剥离金刚石薄膜 |
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| 引用本文： | 赵方海,王庆亚,任临福,郑伟,马力,张玉书. 准分子激光剥离金刚石薄膜[J]. 吉林大学学报(理学版), 1994, 0(2) |
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| 作者姓名： | 赵方海 王庆亚 任临福 郑伟 马力 张玉书 |
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| 作者单位： | 集成光电子学国家重点联合实验室吉林大学实验区，吉林大学电子工程系 |
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| 摘 要： | 准分子激光剥离金刚石薄膜赵方海，王庆亚，任临福，郑伟，马力，张玉书（集成光电子学国家重点联合实验室吉林大学实验区，吉林大学电子工程系，长春１３００２３）关键词准分子激光器，光解剥离，阈值金刚石材料具有材质硬、热导率高等优点￣［１］，是良好的机械加工刀...
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| 关 键 词： | 准分子激光器，光解剥离，阈值 |
Ablation of Diamond Thin Film by Excimer Laser |
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| Zhao Fanghai, Wang Qingya, Ren Linfu, Zheng Wei, Ma Li, Zhang Yushu. Ablation of Diamond Thin Film by Excimer Laser[J]. Journal of Jilin University: Sci Ed, 1994, 0(2) |
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| Authors: | Zhao Fanghai Wang Qingya Ren Linfu Zheng Wei Ma Li Zhang Yushu |
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| Abstract: | The present paper reports the research results of the ablative photodecompositionagainst the diamond thin film by excimer lasqer. Meanwhile, the result is also analyzed anddiscussed. The light energy density threshold was determined. |
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| Keywords: | excimer laser ablative photodecomposition threshold |
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