溅射离子泵抽气单元放电及离子输运仿真

基于有限元法，对溅射离子泵抽气单元内气体放电及离子输运过程进行了研究.采用商业软件COMSOL Multiphysics将等离子体模块、磁场模块、带电粒子追踪模块进行耦合，计算得到阳极筒内电子密度的分布规律.研究了气体压强、阳极电压、磁场强度等参数对电子密度的影响，追踪了离子在不同压强下的运动轨迹，得到了离子对阴极板的入射角度和冲击能量.将仿真结果代入到理论抽速计算公式中，所得结果与实验数据进行对比，两者具有很好的一致性，验证了仿真模型的准确性.对离子泵结构设计和性能优化提供了一种适用方法.

Simulation Investigation on Discharge and Ion Transport of Pumping Units for Sputter Ion Pumps

Based on the finite element method(FEM)， the discharge and ion transport processes of the sputter ion pumping units were studied. The plasma module， the magnetic field module， and the charged particle tracking module were coupled by COMSOL Multiphysics. The distribution law of electron density in the anode cylinder was obtained. The effects of parameters such as pressure， anode voltage and magnetic field strength on electron density were investigated. The trajectories of the ions at different pressures were tracked， and the impact energy and angle of the ions to the cathode plates were obtained. The obtained parameters were then applied to the theoretical pumping speed calculation and the results were compared with the experimental pumping speed. They have good consistency and verify the accuracy of the simulation model， which provides a suitable method for structural design and performance optimization of sputter ion pumps.