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| 电弧离子镀制备Cr-O-N涂层及生长机理探讨 | |
| 引用本文： | 李伟洲,李月巧,梁天权,胡治流,孙超.电弧离子镀制备Cr-O-N涂层及生长机理探讨[J].广西大学学报(自然科学版),2009,34(1). |
| 作者姓名： | 李伟洲 李月巧 梁天权 胡治流 孙超 |
| 作者单位： | 1. 广西大学,材料科学与工程学院,广西,南宁,530004;中国科学院,金属研究所表面工程部,辽宁,沈阳,110016 2. 广西大学,材料科学与工程学院,广西,南宁,530004 3. 中国科学院,金属研究所表面工程部,辽宁,沈阳,110016 |
| 基金项目： | 广西自治区科学基金，广西大学科研基金 |
| 摘 要： | 为了弄清O2和N2的流量变化和基体负偏压对涂层微观结构的影响,利用电弧离子镀技术制备了Cr-O-N涂层,对涂层样品进行了X射线衍射分析,扫描电镜和原子力显微镜观察,电子探针成分分析,结果表明Cr-O-N涂层含CrN和Cr2O3相,衍射峰的择优取向、涂层的表面粗糙度、相含量和化学成分与制备过程中的气体流量、基体负偏压等因素密切相关:随着氧流量的增加,涂层的表面粗糙度上升,涂层中氧元素含量和Cr2O3相含量增多;基体负偏压的升高有利于涂层沿CrN(220),Cr2O3(300)面择优生长和涂层的致密性提高. |
| 关 键 词： | 电弧离子镀 Cr-O-N涂层 气体流量 表面粗糙度 |
Preparation and investigation of the growth mechanism of Cr-O-N coating |
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| LI Wei-zhou,LI Yue-qiao,LIANG Tian-quan,HU Zhi-liu,SUN Chao.Preparation and investigation of the growth mechanism of Cr-O-N coating[J].Journal of Guangxi University(Natural Science Edition),2009,34(1). | |
| Authors: | LI Wei-zhou LI Yue-qiao LIANG Tian-quan HU Zhi-liu SUN Chao |
| Institution: | 1.College of Materials Science and Engineeing;Guangxi University;Nanning 530004;China;2.Division of Surface Engineering of Materials;Institute of Metal Research;Chinese Academy of Sciences;Shenyang 110016;China |
| Abstract: | The Cr-O-N coating was deposited by arc ion plating(AIP) technique.The specimens were analyzed by X-ray diffraction(XRD) and electron probe microanalyzer(EPMA),and were observed by scanning electron microscope(SEM) and atomic force microscope(AFM).The results indicated that there are CrN and Cr2O3 phases in the Cr-O-N coating;the preferred orientation,the surface roughness,the phase content and chemical composition of the Cr-O-N coating are dependent on the gas flow rates and the bias voltage during deposit... |
| Keywords: | arc ion plating Cr-O-N coating gas flow rate surface roughness |
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