| 薄膜介质表面电荷密度测量中探头边缘效应影响的消除 |
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| 引用本文： | 张冶文,刘耀南.薄膜介质表面电荷密度测量中探头边缘效应影响的消除[J].西安交通大学学报,1986(3). |
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| 作者姓名： | 张冶文 刘耀南 |
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| 作者单位： | 西安交通大学电气工程系,西安交通大学电气工程系 |
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| 摘 要： | 本文提出了二维的探头特性函数的概念,完成了用实验方法测取探头特性函数的工作。提出了利用探头特性函数,从表面电位的分布测量值中消除边缘效应影响的理论和方法,以提高探头对电荷面分布测量的分辨能力。对实验数据经用实测的探头特性函数和消除边缘效应的方法处理后所得的结果是令人满意的。
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| 关 键 词： | 电荷密度 测量方法 |
ELIMINATION OF THE EDGE EFFECT OF AN INDUCTIVE PROBE FOR MEASURING SURFACE CHARGE DENSITY ON A DIELECTRIC FILM |
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| Zhang Yewen,Liu Yaonan.ELIMINATION OF THE EDGE EFFECT OF AN INDUCTIVE PROBE FOR MEASURING SURFACE CHARGE DENSITY ON A DIELECTRIC FILM[J].Journal of Xi'an Jiaotong University,1986(3). |
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| Authors: | Zhang Yewen Liu Yaonan |
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| Institution: | Zhang Yewen;Liu Yaonan Department of Electrical Engineering |
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| Abstract: | In this paper, the concept of "probe characteristic function" which is used in case of two-dimensional plot is described, and an experimental method for getting the probe characteristc function is given. In order to improve the resolution for measurement of surface charge density distribution, a new method is suggested. It is based on eliminating the edge effect of the probe from the meesured surface potential distribution by using the probe characteristic function. The experimental results show that this technique is useful for improvihg the resolution of surface charge density measurements. |
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| Keywords: | CHARGE DENSITY MEASUREMENT METHODS |
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