功能绝缘材料加工工艺对电润湿显示器性能的影响

电润湿显示器是基于氟树脂层（如AF1600）作为疏水绝缘层，通过外加电压来改变液体在其表面润湿性来达到显示效果的装置，为了使光刻胶层和氟树脂层有很好的粘结性能，对氟树脂表面进行离子刻蚀来增大其润湿性. 光刻后需恢复氟树脂疏水性以恢复其电润湿特性. 常用方法是通过高温回流(High Temperature Reflow Method)的方法使刻蚀后的氟树脂表面熔融流平，但高温会造成光刻胶材料黄变，像素格变形等缺陷. 本文通过蒸汽溶解法(Vapor Redissolve Method)代替高温回流法来恢复氟树脂层的疏水性能，使用氟碳溶剂（HFE7100）蒸汽溶解氟树脂层粗糙表面形成溶胶状态，加热蒸发溶剂后使表面恢复疏水性质. 本文针对蒸汽溶解法溶解时间、干燥温度和干燥时间等条件进行探究，并对高温回流法和蒸汽溶解法对电润湿显示器产生的物理和光电影响进行了对比研究.

Process Influence on Electro-Wetting Display Insulator Material Property

Electrowetting display is a kind of device that use fluororesin layer (e.g. AF1600) as the hydrophobic insulating layer. It works with changing applied voltages to change the surface wettability of liquid. In order to get better adhesive properties for photoresist layer and the fluororesin layer, ion itching should be done to increase the wettability.　Electro-wetting properties need to be restored by recovering fluororesin hydrophobic wetting properties after photolithography. A usual method is high temperature reflow. This method would melt leveling thefluorine resin surface, but high temperature would also cause　defects like yellowing photoresist material, pixel grid deformation etc. In this paper , instead of high temperature reflow method, vapor redissolve method was suggested to recover hydrophobicity, using a fluorocarbon solvent(HFE7100) steam to dissolve fluororesin layer surface roughened sol state. After heating, the solvent was evaporated to restore the hydrophobic nature of its surface. Focus on the dissolving time, drying temperature and drying time, deep research was done in this paper. Comparion on physical effects and photoelectric effects to electrowetting display devices are made between these two methods.