| EACVD中基片表面电子及氢原子能量分布 |
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| 引用本文： | 董丽芳,张玉红,陈俊英.EACVD中基片表面电子及氢原子能量分布[J].河北大学学报(自然科学版),2001,21(1):34. |
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| 作者姓名： | 董丽芳 张玉红 陈俊英 |
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| 作者单位： | 河北大学 物理科学与技术学院 |
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| 摘 要： | 采用Monte Carlo方法，模拟了EACVD淀积金刚石薄膜中氢分解过程 .建立了电子碰撞使氢分解的模型，给出了在基片表面电子及氢原子的能量分布.结果对EACVD淀积金刚石 薄膜的研究有重要意义.
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| 关 键 词： | 蒙特卡罗模拟 化学气相沉积 氢分解 |
Energy Distribution of Electrons and H Atoms on the Surface of the Substrate during Electron Assisted Chemical Vapor Deposition of Diamond |
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| DONG Li-fang,ZHANG Yu-hong,CHEN Jun-ying.Energy Distribution of Electrons and H Atoms on the Surface of the Substrate during Electron Assisted Chemical Vapor Deposition of Diamond[J].Journal of Hebei University (Natural Science Edition),2001,21(1):34. |
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| Authors: | DONG Li-fang ZHANG Yu-hong CHEN Jun-ying |
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| Abstract: | Hydrogen dissociation in the process of electron assisted chemical vapor deposition(EACVD)of diamond thin films is simulated by using Monte Carlo method. The model of hydrogen dissociation through electron impacting is suggested. The energy distribution of electrons and H atoms on the surface of the substrate are obtained. The results are of great importance to the study of diamond thin films deposited by EACVD |
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| Keywords: | Monte Carlo Simulation EACVD Dissociation of Hydrogen |
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