| 曹春岳：运用介电泳技术将SnO2纳米球体作为敏感元件的相对湿度传感器特性 |
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| 引用本文： | 曹春岳.曹春岳：运用介电泳技术将SnO2纳米球体作为敏感元件的相对湿度传感器特性[J].华东师范大学学报(自然科学版),2012,2012(5):16-23,36. |
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| 作者姓名： | 曹春岳 |
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| 作者单位： | 华东师范大学电子工程系,上海,200241 |
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| 基金项目： | 国家自然科学基金(50502036);上海市曙光计划项目(06SG30) |
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| 摘 要： | 通过介电泳技术将敏感元件SnO2球形纳米颗粒定位到间距为20μm的Au叉指电极之间, 制备了一种相对湿度传感器. 从获得的I-V曲线可以看出, Au/SnO2/SnO2/Au组合结构具有良好的电导率. 通过自己设计的相对湿度测试系统 测试了其传感特性, 结果显示该湿度传感器具有高的敏感性及可重复性. 证明了运用介电泳方法所制备的湿度传感器在各种不同的湿度条件下, 都具有很好的稳定性, 即使是在非常高的湿度条件下. 并且这种方法可以广泛用于其它种类的纳米球和各种不同器件结构中.
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| 关 键 词： | 介电泳 纳米球体 二氧化锡 微电极 湿度传感器 |
| 收稿时间： | 2011-11-01 |
Characterization of a humidity sensor fabricated with SnO2 nano-spheres via dielectrophoresis |
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| CAO Chun-yue.Characterization of a humidity sensor fabricated with SnO2 nano-spheres via dielectrophoresis[J].Journal of East China Normal University(Natural Science),2012,2012(5):16-23,36. |
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| Authors: | CAO Chun-yue |
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| Institution: | CAO Chun-yue (Department of Electronic Engineering,East China Normal University, Shanghai 200041,China) |
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| Abstract: | A relative humidity sensor was fabricated by dielectrophoresis（DEP） to connect with the sphere-shaped SnO2 nano-particles as sensing elements based on the Au microelectrodes with the gap of 20μm.the I-V curve obtained verified good electric conductivity of the Au/SnO2/SnO2/Au structure fabricated.The sensing properties were tested in a self-designed relative humidity measuring system.The high sensitivity and good repeatability were obtained.It was proved the sensing structure fabricated in the solution using DEP has good stability under varied humidity levels,even under a high humidity level. The proposed methodology can be easily applied to other nano-spheres and construction of other devices. |
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| Keywords: | dielectrophoresis nano-sphere tin oxide micro-electrode humidity sensor |
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