| 平面变栅距位相光栅位移传感器的测量精度极限 |
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| 引用本文： | 沈燕,周静,刘大禾. 平面变栅距位相光栅位移传感器的测量精度极限[J]. 北京师范大学学报(自然科学版), 2007, 43(2): 166-169 |
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| 作者姓名： | 沈燕 周静 刘大禾 |
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| 作者单位： | 北京师范大学物理学系,100875,北京;北京师范大学物理学系,100875,北京;北京师范大学物理学系,100875,北京 |
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| 摘 要： | 提出用透射式变栅距位相光栅作位移传感器,用标量衍射理论讨论了这种传感器的测量精度与光栅的起始栅距及栅距变化系数之间的关系,同时用时域有限元差分(FDTD)算法计算了变栅距位相光栅的衍射场,计算结果表明受衍射偏振特性的影响,这种位移传感器的测量精度在理论上存在极限.
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| 关 键 词： | 位移传感器 变栅距光栅 FDTD算法 |
| 修稿时间： | 2006-12-18 |
MEASURING PRECISION LIMIT OF DISPLACEMENT SENSOR BASED ON VARIED-LINE-SPACE PLANE PHASE GRATING |
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| Shen Yan,Zhou Jing,Liu Dahe. MEASURING PRECISION LIMIT OF DISPLACEMENT SENSOR BASED ON VARIED-LINE-SPACE PLANE PHASE GRATING[J]. Journal of Beijing Normal University(Natural Science), 2007, 43(2): 166-169 |
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| Authors: | Shen Yan Zhou Jing Liu Dahe |
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| Affiliation: | Department of Physics, Beijing Normal University, 100875, Beijing, China |
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| Abstract: | A displacement sensor based on transmission varied-line-space (VLS) phase gratings is proposed.The relationship between the measure precision of the sensor and the parameters of VLS,including the beginning period and the period change coefficient of VLS,is discussed by scalar diffraction theory.At the same time,the distribution of the diffractive field of a VLS is calculated by Finite difference time domain(FDTD) algorithm.The calculated result indicates that a measuring precision limit exists theoretically for this kind of displacement sensor because the diffraction field is polarization related. |
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| Keywords: | displacement sensor varied-line-space gratings FDTD algorithm |
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