| Te原子团的形成研究 |
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| 引用本文： | 张芳伟,冯嘉猷,郑毅,范玉殿.Te原子团的形成研究[J].清华大学学报(自然科学版),1994(3). |
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| 作者姓名： | 张芳伟 冯嘉猷 郑毅 范玉殿 |
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| 作者单位： | 清华大学材料科学与工程系 |
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| 基金项目： | 国家自然科学基金,三束材料改性国家重点联合实验室（复旦大学分部）资助 |
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| 摘 要： | 原子团的形成和状态是研究离化原子团淀积（ＩＣＢＤ）机理的首要问题。作者采用一种新的测量方法研究了Ｔｅ在不同蒸发温度下形成的原子团的平均尺寸和尺寸分布。对朗加热温度从６５０Ｋ增大到７９０Ｋ时，Ｔｅ平均原子团尺寸从１０个原子增大到７５个原子。离化电压大于２５０Ｖ时，原子团经过高化区，部分碎裂成小原子团或原子。
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| 关 键 词： | 碲 薄膜淀积 离化原子团 |
Study on formation of Te clusters |
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| Zhang Fangwei, Feng Jiayou, Zheng Yi, Fan Yudian.Study on formation of Te clusters[J].Journal of Tsinghua University(Science and Technology),1994(3). |
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| Authors: | Zhang Fangwei Feng Jiayou Zheng Yi Fan Yudian |
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| Institution: | Department of Materials Science and Engineering Tsinghua University |
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| Abstract: | The formation and status of clusters are basic and important problems instudy of the mechanism of ionized cluster beam deposition (ICBD) technique. A newmethod was developed to measure the average cluster size and cluster size distribution ofTe at different crucible temperatures. The average size altered from 10 to 75 atoms whenthe crucible temperature increased from 650 K to 790 K. When the ionizer voltage washigher than 250 V, partial clusters were broken into small ones and single atoms byelectron bombardment when the cluster beam passed through the ionizer. |
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| Keywords: | tellurium thin film deposition ionized cluster beam |
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