| 平行圆板型PCVD质量转换过程动力学研究 |
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| 引用本文： | 朱大奇,刘祖黎,陈俊芳.平行圆板型PCVD质量转换过程动力学研究[J].华中科技大学学报(自然科学版),1992(5). |
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| 作者姓名： | 朱大奇 刘祖黎 陈俊芳 |
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| 作者单位： | 华中理工大学物理系
(朱大奇，刘祖黎)，华中理工大学物理系(陈俊芳) |
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| 基金项目： | 国家自然科学基金资助课题 |
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| 摘 要： | 本文对平行圆板型装置中等离子体化学汽相沉积(PCVD)质量转换过程,提出了一种数学描述方法.文中通过数值计算,主要讨论了活性粒子的产生频率、活性粒子沉积速率的径向分布及沉积速率与过程参量(如系统内气压、气体流速等)的相互关系,并对部分结果进行了理论分析.
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| 关 键 词： | 等离子体 汽相沉积 碰撞电离 辉光放电 |
A Mass Transfer Model for PCYD in the Radial-Flow Reactor |
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| Zhu Daqi Liu Zuli Chen Junfang.A Mass Transfer Model for PCYD in the Radial-Flow Reactor[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1992(5). |
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| Authors: | Zhu Daqi Liu Zuli Chen Junfang |
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| Institution: | Zhu Daqi Liu Zuli Chen Junfang |
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| Abstract: | A dynamic model for PCVD in the radial-flow reactor is proposed. The generation frequency and the deposition rate in the radial direction are obtained by numerical modelling. It is found that the deposition rate depends on the electron density and the gas residence time. The relationships between the deposition rate of the radicals and the process paiameters are examined by numerical modelling. It can be seen that the deposition rate is not very sensitive to the flow rate and that it has a maximum with a variation of the gas pressure and the distance between plates. |
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| Keywords: | Plasma PCVD impact ionization glow discharge |
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