| 本底真空度对PVD/TiN涂层组织和性能的影响 |
| |
| 引用本文： | 魏仕勇,付青峰,曹美蓉,万珍珍.本底真空度对PVD/TiN涂层组织和性能的影响[J].江西科学,2013(6):797-799. |
| |
| 作者姓名： | 魏仕勇 付青峰 曹美蓉 万珍珍 |
| |
| 作者单位： | 江西省科学院铜钨新材料重点实验室,江西南昌330029 |
| |
| 基金项目： | 江西省科学院国家预研项目（2011-YGY-02）;江西省科学院惠普项目（2013-XTPH2-22）. |
| |
| 摘 要： | 采用物理气相沉积（PVD） TiN涂层的表面处理技术,对合金结构钢进行表面强化处理.分析了不同本底真空度下TiN涂层的硬度、膜基结合力以及涂层颗粒尺寸等.结果表明,本底真空度在7.8×10-3～ 10.0×10-2 Pa范围内,本底真空度与涂层颗粒尺寸成反比,与硬度和膜基结合力成正比.当其为7.8×10-3 Pa时进行30-40 min沉积的涂层,涂层硬度可达到1 878.63 HVo.1,结合力达到7.86 N.
|
| 关 键 词： | 本底真空度 PVD TiN涂层 42CrMo钢 |
Effect the Bachground Vacuum Degree the Microstructure and Properties of the TiN Coating Deposited by PVD |
| |
| WEI Shi-yong,FU Qing-feng,CAO Mei-rong,WAN Zhen-zhen.Effect the Bachground Vacuum Degree the Microstructure and Properties of the TiN Coating Deposited by PVD[J].Jiangxi Science,2013(6):797-799. |
| |
| Authors: | WEI Shi-yong FU Qing-feng CAO Mei-rong WAN Zhen-zhen |
| |
| Institution: | (Institute of Applied Physics ,Jiangxi Academy of Sciences ,Jiangxi Nanchang 330029 PRC) |
| |
| Abstract: | The alloy steel was processed surface strengthening treatment by the physical vapor deposi- tion technology （PVD）. It was analyzed the hardness, the film adhesion and particle size of TiN coating under different background vacuum in thig paper. The results show that the vacuum degree is inverse proportional to the particle size of coating and direct proportional to the hardness and adhesion in 7.8 ×10-3- 10.0 ×10-2 Pa range. When the 7.8 ×10-3 Pa,the hardness of TiN coating has up to 1 878.63 HV0. t and the binding force of coating is up to 7.86 N in the process of coating deposition at 30 -40 min. |
| |
| Keywords: | Bachground vacuum degree PVD TiN coating 42CrMo steel |
| 本文献已被 维普 等数据库收录！ |
