| 氧化镍一氧化锌复合薄膜光波导气体传感器的制备及气敏性能研究 |
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| 引用本文： | 阿布力孜·伊米提,米日古力·莫合买提,阿达来提·阿不都热合曼. 氧化镍一氧化锌复合薄膜光波导气体传感器的制备及气敏性能研究[J]. 新疆大学学报(自然科学维文版), 2013, 0(1): 1-8 |
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| 作者姓名： | 阿布力孜·伊米提 米日古力·莫合买提 阿达来提·阿不都热合曼 |
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| 摘 要： | 本文通过溶胶-凝胶法，研制了氧化镍一氧化锌复合薄膜／Sn掺杂玻璃光波导（OpticalWaveguide，owe）气体传感器，并调节敏感层（yio—ZnO薄膜1中NiO的最佳含量对挥发性有机物气体进行检测。所研制的（5％）NiO—ZnO复合薄膜／sn掺杂玻璃光波导气体传感器对体积比浓度为1×10—7（v／vo）的二甲苯气体具有一定的选择性响应。该传感器具有灵敏度高、容易制备和重复使用等特点。
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| 关 键 词： | 光波导气体传感器 氧化镍掺杂的氧化锌复合薄膜 溶胶凝胶法 二甲苯气体 |
Preparation of Nickel Oxide-Zinc Oxide Composite Thin Film Optical Waveguide Gas Sensor and Its Gas-sensing Properties |
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| Abstract: | In this paper, Nickel oxide doped Zinc oxide composite thin film/tin-diffused glass optical waveguide gas sensor was developed by a sol-gel method. The optimum doping amount of the Nickel oxide in the composite film was selected and was used to detect volatile organic compounds. The experimental results showed that, the Nickel oxide-Zinc oxide composite thin film OWG gas sensor which contained 5% wt of Nickel oxide, exhibited a certain selective response to 1 × 10-7 （volume ratio） of xylene vapor. The sensor can be easily fabricated, can be reproduced and also characterized by high sensitivity. |
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| Keywords: | optical waveguide gas sensor Nickel oxide doped Zinc oxide composite thin film sol-gel method xylene vapor |
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