| 基于ZERBST方法的少子寿命测量的数值仿真验证 |
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| 引用本文： | 陈晓敏. 基于ZERBST方法的少子寿命测量的数值仿真验证[J]. 重庆邮电大学学报(自然科学版), 2011, 23(3): 320-322 |
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| 作者姓名： | 陈晓敏 |
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| 作者单位： | 成都电子机械高等专科学校 信息与计算科学系，四川 成都 610031 |
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| 摘 要： | 针对半导体器件及其工艺制造中所需要测量的载流子寿命进行研究，利用MEDICI二维器件仿真软件对测量少子寿命的金属绝缘层半导体（metal insulator semiconductor，MIS）结构的恢复特性进行了仿真，并通过ZERBST法得出了器件的少子寿命，其结果与预设的参数相差不大，达到了验证的预定目的。该仿真验证对半导体器件制造中实际的少子寿命的测量具有一定的实践指导作用。
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| 关 键 词： | ZERBST法；少子寿命；MEDICI |
| 收稿时间： | 2010-10-12 |
Numerical simulation of measuring the minority carrier lifetime based on the ZERBST method |
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| CHEN Xiao-min. Numerical simulation of measuring the minority carrier lifetime based on the ZERBST method[J]. Journal of Chongqing University of Posts and Telecommunications, 2011, 23(3): 320-322 |
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| Authors: | CHEN Xiao-min |
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| Affiliation: | Department of Mathematics and Computer Science, Chengdu Electromechanical College, Chengdu 610031,P.R.China |
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| Abstract: | This paper gives out the simulation result of the recovery characteristic of the MIS structure, which is one of the mainstream methods to examine the minority carrier lifetime, with using the 2 Dimension numerical device simulator MEDICI. Then, the lifetime is calculated by the method of ZERBST, and the calculated result is close to the pre-set value, which means the ZERBST method is useful. This simulation method gives a significant guide to the real lifetime measurement. |
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| Keywords: | ZERBST method minority carrier lifetime MEDICI |
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