| 甲烷浓度对大面积金刚石膜生长的影响 |
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| 引用本文： | 毕冬梅,赵利军,王丽丽.甲烷浓度对大面积金刚石膜生长的影响[J].长春大学学报,2006(12). |
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| 作者姓名： | 毕冬梅 赵利军 王丽丽 |
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| 作者单位： | 长春大学理学院 吉林长春130022(毕冬梅，王丽丽)，长春大学特殊教育学院 吉林长春130022(赵利军) |
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| 基金项目： | 863项目(2002AA325090) |
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| 摘 要： | 采用电子辅助热灯丝化学气相沉积(EA.CVD)方法沉积大面积金刚石膜,在金刚石膜的沉积过程中,碳源浓度的变化会直接影响着金刚石膜的生长和质量。使用Raman,SEM等手段对金刚石膜的生长特性进行了表征。
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| 关 键 词： | 金刚石膜 甲烷浓度 膜的质量 |
Influence of methane concentration on the growth of large area diamond film |
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| BI Dong-mei,ZHAO Li-jun,WANG Li-li.Influence of methane concentration on the growth of large area diamond film[J].Journal of Changchun University,2006(12). |
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| Authors: | BI Dong-mei ZHAO Li-jun WANG Li-li |
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| Institution: | BI Dong-mei~1,ZHAO Li-jun~2,WANG Li-li~1 |
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| Abstract: | Large area diamond films were deposited by EA-CVD method.During deposition,the growth and quality of diamond films were influenced by the change of methane concentration.The growth property of diamond film was characterized by using Raman spectrum and scan transmission electron microscopy(SEM). |
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| Keywords: | diamond film methane concentration quality of diamond films |
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