| 扫描电子显微镜在红外探测器材料分析中的应用 |
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| 引用本文： | 陈伯良,俞锦陛,丁素珍,王行丰.扫描电子显微镜在红外探测器材料分析中的应用[J].应用科学学报,1983,1(1):63-70. |
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| 作者姓名： | 陈伯良 俞锦陛 丁素珍 王行丰 |
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| 作者单位： | 中国科学院上海技术物理研究所 |
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| 摘 要： | 用国产DX-3A型扫描电子显微镜分析红外探测器材料,可成功地检测线度10μm以下的碲镉汞中的富磅夹杂相和碲锡铅中的金属夹杂相.精密测量了Hg1-xCdxTe和Pb1-xSnxTe的微区组成,可分辨出△x/x>2%的横向组成不均匀性.也可相当精确地测量PbSnTe-PbTe异质外延层的厚度.
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| 收稿时间： | 1981-09-30 |
APPLICATIONS OF SCANNING ELECTRON MICROSCOPE IN EXAMINATION OF INFRARED DETECTOR MATERIALS |
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| CHEN BOLIANG,YU JINBI,DIN SUZHEN,WANG XINGFENG.APPLICATIONS OF SCANNING ELECTRON MICROSCOPE IN EXAMINATION OF INFRARED DETECTOR MATERIALS[J].Journal of Applied Sciences,1983,1(1):63-70. |
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| Authors: | CHEN BOLIANG YU JINBI DIN SUZHEN WANG XINGFENG |
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| Institution: | Shanghai Institute of Technical Physics, Academia Sinica |
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| Abstract: | In this paper some results from examining infrared detector materials using scanning electron microscope of type DX-3A (manufactured in China) are reported. Te-rich inclusions in HgCdTe and metal inclusions in PbSnTe have been detected successfully, the smallest dimension of which is ten micrometers. Precision determination of compositions of Hg1-xCdxTe and Pb1-xSnxTe crystals is made, and inho-mogeneity of △x/x>2% in a crystal wafer can be discriminated. The thieknees of hetero-epitaxial layer of PbSnTe-PbTe can also be determined. |
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