| 高精度数字压力计的研制 |
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| 引用本文： | 谢森 莫宇斌. 高精度数字压力计的研制[J]. 上海大学学报(自然科学版), 1996, 2(1): 84-90 |
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| 作者姓名： | 谢森 莫宇斌 |
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| 作者单位： | 上海大学自动化学院，上海自动化仪表四厂 |
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| 摘 要： | 扩散硅压力传感器具有体积小、灵敏度高、响应速度快等优点，但存在温度漂移和非线性问题，这是研制高精度数字压力计必须解决的技术难点．本文分析并建立了对其实现综合补偿的方程式，利用单片微机软件实现综合补偿方程，较好地解决了压力传感器的非线性、温度补偿和零点修正．研制出的数字压力计精度达０．０５级．
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| 关 键 词： | 扩散硅压力传感器；数字压力计；非线性补偿；温度补偿 |
The Development of High Precision Digital Pressure Meter |
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| Xie Sen. The Development of High Precision Digital Pressure Meter[J]. Journal of Shanghai University(Natural Science), 1996, 2(1): 84-90 |
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| Authors: | Xie Sen |
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| Abstract: | The silicon pressure resistor sensor has the advangtages of compactness,high sensitivity and rapid response.But the sensor has temperature drift and non-linear.This is the major technical problem to be solved in developing high precision digital pressure meters.The paper analizes and sets up a formula used to realize its compound compensation. Using single-chip microcomputer software designed to realize compound compensation formula solves the problems of nonlinear, temperature and zero-drift compensation of the pressure sensor satisfactorily.The designed digital pressure meter reaches the precision level of 0.05%. |
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| Keywords: | silicon pressure resistor sensor digital pressure meter nonlinear compensation temperature compensation |
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