Structural study of sputtered nanocrystalline Ti and Zr by X-ray diffraction

Conclusion The structure of sputtered Ti and Zr deposited on substrate cooled by liquid nitrogen was investigated by X-ray diffraction technique. Results show that deposited Ti and Zr are composed of nanocrystalline particles, and the average grain sizes are respectively 7.2 and 6.3 nm. These nanocrystalline particles have different structures with common metal under the condition of room temperature and atmospheric pressure. The sputtered nanocrystalline Ti has b. c. c. structure, and the sputtered nanocrystalline Zr the ω-phase structure. Forming of the abnormal structure depends on the energy of sputtered particle and small grain size. The energy carried by sputtered particles could have met the kinetic requirement for forming of abnormal structure, while the nanometer grain size could make the abnormal structure have lower energy than normal structure.