| 类金刚石碳膜的微结构与光学特性 |
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| 引用本文： | 杨伟毅,龚文宪.类金刚石碳膜的微结构与光学特性[J].南京理工大学学报(自然科学版),1992(5). |
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| 作者姓名： | 杨伟毅 龚文宪 |
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| 作者单位： | 华东工程学院光电技术系
(杨伟毅)，无锡市教育学院(龚文宪) |
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| 摘 要： | 利用付里叶变换红外(FTIR)光谱仪和X射线激发的CKLL俄歇电子谱的一次微分表征了类金刚石(DLC)膜的微结构。指出在高离子轰击能量和低CH_4压强下,射频等离子体沉积所制得的DLC膜具有好的热稳定性,膜内主要以sp~3 C-C键为主,折射率(红外)、光学带隙几乎为常数。
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| 关 键 词： | 表面分析 rf等离子体沉积 类金刚石碳膜 |
Microstructure Characterization and Optical Properties of Diamondlike Carbon Films. |
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| Yang Weiyi.Microstructure Characterization and Optical Properties of Diamondlike Carbon Films.[J].Journal of Nanjing University of Science and Technology(Nature Science),1992(5). |
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| Authors: | Yang Weiyi |
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| Institution: | Yang Weiyi Department of Opto-electric Technique |
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| Abstract: | Microstructure of diamondlike carbon (DLC) films werecharacterized by using Fourier transform IR spectroscopy and CKLLfirst-derivative X-ray excited Auger electron spectra. Examinations in-dicate that DLC films prepared via rf-plasma deposition under high ionbombardment energy and low CH_4 pressure have good thermal stabili-ty,and sp~3 C-C bonds in these films are dominate,and refractive index(IR),optical gap are almost constant. |
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| Keywords: | surface analysis rf plasma deposition DLC film |
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