| 准分子激光微细加工 |
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| 引用本文： | 楼祺洪,章琳.准分子激光微细加工[J].杭州师范学院学报(自然科学版),2002(4). |
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| 作者姓名： | 楼祺洪 章琳 |
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| 作者单位： | 中国科学院上海光学精密机械研究所 上海201800
(楼祺洪)，中国科学院上海光学精密机械研究所 上海201800(章琳) |
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| 摘 要： | 准分子激光对无机和有机材料都有着很好的消融和蚀刻性能 .本文主要描述了准分子激光消融和蚀刻在微细加工方面的应用
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| 关 键 词： | 准分子激光 消融 蚀刻 微细加工 |
Micromachining with excimer laser |
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| LOU Qi\|hong,ZHANG Lin.Micromachining with excimer laser[J].Journal of Hangzhou Teachers College(Natural Science),2002(4). |
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| Authors: | LOU Qi\|hong ZHANG Lin |
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| Abstract: | Excimer laser has excellent ablative and etching performances to both organic and inorganic materials. In this paper, applications of micromachining by excimer laser ablation and etching have been mainly described. |
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| Keywords: | excimer laser ablation etching micromachining |
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