| 采用修正的溶胶-凝胶技术制备PZT铁电薄膜 |
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| 引用本文： | 李建康.采用修正的溶胶-凝胶技术制备PZT铁电薄膜[J].苏州科技学院学报(自然科学版),2005,22(4):22-26. |
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| 作者姓名： | 李建康 |
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| 作者单位： | 苏州科技学院,应用物理系,江苏,苏州,215009 |
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| 基金项目： | 江苏省自然科学基金项目（BK2005039）;江苏省高校自然科学研究计划（05KJB430127） |
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| 摘 要： | 采用一种修正的溶胶-凝胶技术制备出PbZr0.52Ti0.48]O3（PZT）铁电薄膜.对溶胶的整个制备过程进行了红外透射光谱分析,对制备的铁电薄膜结构和性能进行了表征.由XRD图可以看出,退火温度在600℃以上时,薄膜结构为纯的钙钛矿结构.由P-E曲线可以看出,经600℃退火处理的PZT薄膜具有良好的铁电性能.
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| 关 键 词： | 溶胶-凝胶 铁电薄膜 钙钛矿结构 |
| 文章编号： | 1672-0687(2005)04-0022-05 |
| 收稿时间： | 2005-09-12 |
| 修稿时间： | 2005年9月12日 |
Preparation of PZT Ferroelectric Thin Films with the Modified Sol-Gel Technology |
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| LI Jian-kang.Preparation of PZT Ferroelectric Thin Films with the Modified Sol-Gel Technology[J].Journal of University of Science and Technology of Suzhou,2005,22(4):22-26. |
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| Authors: | LI Jian-kang |
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| Institution: | Dept. of Applied Physics, USTS, Suzhou 215009, China |
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| Abstract: | Pb(Zr0.52Ti0.48)O3(PZT) thin films have been prepared on the Pt(111)/Ti/SiO2/Si substrate with the modified sol-gel technology.The whole process for preparing PZT has been analyzed by FTIR spectrophotometer.The structures and properties of the ferroelectric films have been characterized by XRD and P-E curves.The XRD result shows that the structure of the film is pure perovskite structure when the annealing temperature rises above 600.The P-E curve shows that PZT films annealed at the temperature of 600 possess fine ferroelectric properties. |
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| Keywords: | sol-gel ferroelectric films perovskite structure |
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