石油机械大尺寸零件精密测量装置研究

研究了一种可用于工业现场进行大尺寸零件精密测量的装置。该装置以有高稳定性和强抗干扰能力(室外时频率稳定性可达10^-7)的双纵模热稳频He—Ne 激光器为光源，其拍频频率约为790MHz ,拍频波长λ约380mm，拍频波长为测量基准；以拍频波节点为对准标志, 最邻近节点到被测点的尾数间距x₁,x₂用组合于同一光路中的分系统激光干涉仪测量，分辨率为0.08μm的方法来进行大尺寸L的测量 。测试表明，此装置具有很好的环境适应性和同类仪器中最高的频差稳定度。整个测量系统可在0～20m 范围内工作，测量不确定度优于±30μm/ 10m 。对石油机械大尺寸零件测量的环境性和高精度性研究具有重要意义。

LARGE SIZE PRECISSION MEASURMENT DEVICE FOR PETROLEUM MACHINE

A largesize device precissily measuring spares and being able to be applied on site t is studied in the paper．The frequencystabilized HeNe laser with thermoregulation is used as the light source, which operates on the double longitudinal modes and has high frequency stability and good antidisturbance performance, the frequency stability is better than 10^-7 (in open air) . It has the beat frequency about 790MHz and beat frequency wavelength λ=380μm which is benchmark of measurement. The node of the beatwave is used as sampling flag and the distance between the node and the close measuring point is measured with double frequency interferometer, the large size L is measured with the resolution of 0.08μm. The test indicates that the device has a high environment adaptability and highest frequency difference stability among the same kind of existing great size device.The measuring accuracy is better than ±30μm/10m and the measuring range is 0～20m. This results is important to resolve the ambivalent promble between environment and measure precision of large size in petroleum machine.